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Consortium of Swiss Academic Libraries

Nanoimprint lithography: 2D or not 2D? A review

Schift, Helmut

In: Applied Physics A, 2015, vol. 121, no. 2, p. 415-435

Consortium of Swiss Academic Libraries

Next-generation lithography - an outlook on EUV projection and nanoimprint

Schoot, Jan van ; Schift, Helmut

In: Advanced Optical Technologies, 2017, vol. 6, no. 3-4, p. 159-162