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Grazing incidence X-ray fluorescence of periodic structures – a comparison between X-ray standing waves and geometrical optics calculations

Reinhardt, Falk ; Nowak, Stanisław H. ; Beckhoff, Burkhard ; Dousse, Jean-Claude ; Schoengen, Max

In: Journal of Analytical Atomic Spectrometry, 2014, vol. 29, no. 10, p. 1778–1784

Grazing incidence X-ray fluorescence spectra of nano-scaled periodic line structures were recorded at the four crystal monochromator beamline in the laboratory of the Physikalisch-Technische Bundesanstalt at the synchrotron radiation facility BESSY II. For different tilt angles between the lines and the plane of incidence of the monochromatic synchrotron radiation, spectral features are observed...