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    2 results 1
    Postprint
    Consortium of Swiss Academic Libraries

    Focussed ion beam based fabrication of micro-electro-mechanical resonators

    Grogg, Daniel ; Badila-Ciressan, Nicoleta ; Ionescu, Adrian

    In: Microsystem Technologies, 2008, vol. 14, no. 7, p. 1049-1053

    Postprint
    Consortium of Swiss Academic Libraries

    Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps

    Ciressan, Nicoleta ; Hibert, Cyrille ; Mazza, Marco ; Ionescu, Adrian

    In: Microsystem Technologies, 2007, vol. 13, no. 11-12, p. 1489-1493

    2 results 1