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Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry

Münz, F. ; Humlíček, , J. ; Maršík, Premysl

In: Thin Solid Films, 2011, vol. 519, no. 9, p. 2703-2706

Accurate spectroellipsometric (SE) measurements in the rotating analyzer (RAE) or rotating polarizer (RPE) configurations require accurate values of the polarizer/analyzer(/retarder) azimuths. While the readings are usually fairly accurate, true values are influenced by possible offsets between the plane of incidence, physical axes of the elements, and the instrument scales. The offsets are often...