In: Biomedizinische Technik/Biomedical Engineering, 1990, vol. 35, no. s2, p. 23-28
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In: Analytical Chemistry, 2020, vol. 74, no. 14, p. 3400-3407
This article presents a new integrated microfluidic/microoptic device designed for basic biochemical analysis. The microfluidic network is wet-etched in a Borofloat 33 (Pyrex) glass wafer and sealed by means of a second wafer. Unlike other similar microfluidic systems, elements of the detection system are realized with the help of microfabrication techniques and directly deposited on both sides...
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In: Analytical Chemistry, 2006, vol. 78, no. 21, p. 7453–7460
In this study, we present the development and the characterization of a generic platform for cell culture able to monitor extracellular ionic activities (K+, NH4+) for real-time monitoring of cell-based responses, such as necrosis, apoptosis, or differentiation. The platform for cell culture is equipped with an array of 16 silicon nitride micropipet-based...
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In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2012, vol. 59, no. 3, p. 448-456
We present the microfabrication and characterization of a low-power, chip-scale Rb plasma light source, designed for optical pumping in miniature atomic clocks. A dielectric barrier discharge (DBD) configuration is used to ignite a Rb plasma in a micro-fabricated Rb vapor cell on which external indium electrodes were deposited. The device is electrically driven at frequencies between 1 and 36...
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In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2012, vol. 22, no. 2, p. 025013 (8pp)
This paper presents a new fabrication method to manufacture alkali reference cells having dimensions larger than standard micromachined cells and smaller than glass-blown ones, for use in compact atomic devices such as vapour-cell atomic clocks or magnetometers. The technology is based on anodic bonding of silicon and relatively thick glass wafers and fills a gap in cell sizes and technologies...
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In: Physica Scripta, 2012, vol. T149, p. 014013 (4pp)
We present our microwave spectroscopic studies on laser–microwave double-resonance (DR) signals obtained from a micro-fabricated Rb vapor cell. This study focuses on the characteristics and systematic shifts of the ground-state 'clock transition' in 87Rb (|Fg = 1, mF = 0⟩ → | Fg = 2, mF = 0⟩) used in Rb...
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In: Semiconductor Lasers and Laser Dynamics IV, 2010, vol. 7720, no. 77201T, p. 1-9
We present our evaluation of a compact laser system made of a 795 nm VCSEL locked to the Rubidium absorption line of a micro-fabricated absorption cell. The spectrum of the VCSEL was characterised, including its RIN, FM noise and line-width. We optimised the signal-to-noise ratio and determined the frequency shifts versus the cell temperature and the incident optical power. The frequency...
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In: Microsystem Technologies, 2008, vol. 14, no. 6, p. 753-759
We present a thermally activated solvent bonding technique for the formation of embedded microstructures in polymer. It is based on the temperature dependent solubility of polymer in a liquid that is not a solvent at room temperature. With thermal activation, the liquid is transformed into a solvent of the polymer, creating a bonding capability through segmental or chain interdiffusion at the...
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In: Microsystem Technologies, 2007, vol. 13, no. 11-12, p. 1509-1515
We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. Photopolymer structures have also been...
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In: Microsystem Technologies, 1998, vol. 4, no. 3, p. 147-150
We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. Photopolymer structures have also been...
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