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Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊044) and tilt of suspended monolithic silicon nanowire structures

Dolabella, Simone ; Frison, Ruggero ; Chahine, Gilbert A. ; Richter, Carsten ; Schulli, Tobias U. ; Tasdemir, Zuhal ; Alaca, B. Erdem ; Leblebic, Yusuf ; Dommann, Alex ; Neels, Antonia

In: Journal of Applied Crystallography, 2020, vol. 53, no. 1, p. 58–68

Silicon nanowire-based sensors find many applications in micro- and nano- electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and nano-fabricated silicon-based structures adopting the scanning X-ray diffraction microscopy technique for mapping the in-plane crystalline...