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Fabrication and characterization of MEMS alkali vapor cells used in chip-scale atomic clocks and other atomic devices

Karlen, Sylvain ; Mileti, Gaetano (Dir.)

Thèse de doctorat : Université de Neuchâtel, 2018.

Atomic clocks are timekeeping devices that can achieve extreme performance in terms of stability and accuracy. Behind this name, hides a variety of different systems which size and complexity can be considerably different depending on their applications. The primary frequency standards used for the realization of the second and the clocks mounted on the Galileo satellite positioning system are...

Micromachined electrospray thrusters for spacecraft propulsion

Krpoun, Renato ; Shea, Herbert (Dir.)

Thèse Ecole polytechnique fédérale de Lausanne EPFL : 2009 ; no 4255.

Microfabricated solid oxide fuel cells

Rey-Mermet, Samuel ; Muralt, Paul (Dir.)

Thèse Ecole polytechnique fédérale de Lausanne EPFL : 2008 ; no 4175.

Continuous-flow separation of cells in a lab-on-a-chip using "liquid electrodes" and multiple-frequency dielectrophoresis

Demierre, Nicolas ; Renaud, Philippe (Dir.)

Thèse Ecole polytechnique fédérale de Lausanne EPFL : 2008 ; no 4099.

Orthogonal fluxgate type magnetic microsensors with wide linear operation range

Zorlu, Özge ; Kejik, Pavel (Dir.)

Thèse sciences Ecole polytechnique fédérale de Lausanne EPFL : 2008 ; no 4039.

Development of an aluminum single electron transistor scanning probe

Suter, Kaspar ; Staufer, Urs (Dir.)

Thèse de doctorat : Université de Neuchâtel, 2007 ; Th.2028.

This thesis presents the development of a fabrication process for an Aluminum single electron transistor, experimental results verifying its functionality, and its integration on the tip of a scanning probe for scanning probe microscopy. When an electron passes through a tunnel barrier, it changes the barrier's capacitance, which in turn builds up a voltage across the barrier. If the thermal...

High quality micromachined inductors for integrated communication systems

Carazzetti, Patrick ; De Rooij, Nicolaas (Dir.)

Thèse de doctorat : Université de Neuchâtel, 2006 ; 1902.

High-performance RF inductors have been fabricated with innovative and low-thermal budget micromachining processes. The proposed inductors have been implemented as single-level planar spirals so as to simplify their fabrication. Skin and proximity effects in the metal tracks have been addressed by providing thick layers of Al or Ag and by designing circular and hollow spirals. Energy dissipation...