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A photopatternable superparamagnetic nanocomposite: Material characterization and fabrication of microstructures

Suter, M. ; Ergeneman, , O. ; Zürcher, J. ; Moitzi, Christian ; Pané, S. ; Rudin, T. ; Pratsinis, S.E. ; Nelson, B.J. ; Hierold, C.

In: Sensors and Actuators B: Chemical, 2011, vol. 156, no. 1, p. 433-443

A superparamagnetic nanocomposite obtained by dispersing superparamagnetic magnetite nanoparticles in the epoxy SU-8 is used to fabricate microstructures by photolithography. The dispersion of the nanoparticles and the level of agglomerations are analyzed by optical microscopy, TEM (transmission electron microscope), SAXS (small-angle X-ray scattering), XDC (X-ray disc centrifuge) and XRD (X-ray...