Faculté des sciences
Texte intégral

Design, fabrication and testing of microlens arrays for sensors and microsystems

Nussbaum, Philippe ; Völkel, R. ; Herzig, Hans-Peter ; Eisner, M. ; Haselbeck, S.

In: Pure and Applied Optics: Journal of the European Optical Society Part A, 1997, vol. 6, no. 6, p. 617-636

We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented. More

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    Title
    • Design, fabrication and testing of microlens arrays for sensors and microsystems
    Author
    • Nussbaum, Philippe. Institut de Microtechnique, Université de Neuchâtel, Switzerland
    • Völkel, R.. Institut de Microtechnique, Université de Neuchâtel, Switzerland
    • Herzig, Hans-Peter. Institut de Microtechnique, Université de Neuchâtel, Switzerland
    • Eisner, M.. University of Erlangen - Nürnberg, Applied Optics, Germany
    • Haselbeck, S.. University of Erlangen - Nürnberg, Applied Optics, Germany
    Document Type
    • Postprint
    Publication Date
    • 1997
    Language
    • English
    Published in
    • Pure and Applied Optics: Journal of the European Optical Society Part A, 1997, vol. 6, no. 6, p. 617-636. Institute of Physics (IOP)
    Other Version
    Classification
    • Microengineering
    OAI-PMH Identifier
    • oai:doc.rero.ch:20071210114236-ST
    Submission No.
    • 20071210114236-ST
    Summary
    We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.