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Rrevealing plastic deformation mechanisms in polycrystalline thin films with synchrotron XRD

Nyilas, Ralph ; Frank, Stephan ; Spolenak, Ralph

In: JOM, 2010, vol. 62, no. 12, p. 44-51

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    Title
    • Rrevealing plastic deformation mechanisms in polycrystalline thin films with synchrotron XRD
    Author
    • Nyilas, Ralph. Laboratory for Nanometallurgy, Department of Materials, ETH Zurich, Wolfgang-Pauli-Strasse 10, CH-8093, Zurich, Switzerland
    • Frank, Stephan. Laboratory for Nanometallurgy, Department of Materials, ETH Zurich, Wolfgang-Pauli-Strasse 10, CH-8093, Zurich, Switzerland
    • Spolenak, Ralph. Laboratory for Nanometallurgy, Department of Materials, ETH Zurich, Wolfgang-Pauli-Strasse 10, CH-8093, Zurich, Switzerland
    Document Type
    • Postprint
    Classification
    • Engineering
    OAI-PMH Identifier
    • oai:doc.rero.ch:317749
    Summary
    Understanding the fundamentals of plastic deformation mechanisms in polycrystalline thin metal films and the associated size effects is crucial to the design and fabrication of microelectronic devices. A combination of in-situ synchrotron diffraction experiments was conducted to investigate two cooperative plastic deformation mechanisms in polycrystalline face-centered cubic thin metal films: conjugate deformation twinning in uniaxially strained polycrystalline thin gold films and subgrain structure rotations in biaxially strained polycrystalline thin silver films. The experimental results demonstrate an increase in the total coverage of (115) oriented deformation twins in the thin gold films upon uniaxial deformation to 2% strain at a macroscopic yield stress of 250 MPa