Transparent conducting Sn:ZnO films deposited from nanoparticles

Luo, Li ; Häfliger, Kathrin ; Xie, Dan ; Niederberger, Markus

In: Journal of Sol-Gel Science and Technology, 2013, vol. 65, no. 1, p. 28-35

Add to personal list
    Summary
    Homogeneous transparent conducting Sn:ZnO films on fused silica substrates were prepared by dip-coating from nanoparticle dispersions, while the nanocrystalline Sn:ZnO particles with different dopant concentrations were synthesized by microwave-assisted non-aqueous sol-gel process using Sn(IV) tert-butoxide and Zn(II) acetate as precursors and benzyl alcohol as solvent. The dopant concentration had a great impact on the electrical properties of the films. A minimum resistivity of 20.3Ωcm was obtained for a porous Sn:ZnO film with initial Sn concentration of 7.5mol% after annealing in air and post-annealing in N2 at 600°C. The resistivity of this porous film could further be reduced to 2.6 and 0.6Ωcm after densified in Sn:ZnO and Al:ZnO reaction solution, respectively. The average optical transmittance of a 400-nm-thick Sn:ZnO film densified with Sn:ZnO after the two annealing steps was 91%