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Optically interrogated MEMS pressure sensor array

Prochazka, Lukas ; Meier, Alexander ; Viggiani, Antonio ; Roesgen, Thomas

In: Experiments in Fluids, 2012, vol. 52, no. 4, p. 1003-1015

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    Titre
    • Optically interrogated MEMS pressure sensor array
    Auteur
    • Prochazka, Lukas. Institute of Fluid Dynamics, ETH Zurich, Sonneggstrasse 3, 8092, Zurich, Switzerland
    • Meier, Alexander. Institute of Fluid Dynamics, ETH Zurich, Sonneggstrasse 3, 8092, Zurich, Switzerland
    • Viggiani, Antonio. Institute of Fluid Dynamics, ETH Zurich, Sonneggstrasse 3, 8092, Zurich, Switzerland
    • Roesgen, Thomas. Institute of Fluid Dynamics, ETH Zurich, Sonneggstrasse 3, 8092, Zurich, Switzerland
    Type de document
    • Postprint
    Classification
    • Technologie, Sciences de l'ingénieur
    Identifiant OAI-PMH
    • oai:doc.rero.ch:316424
    Summary
    A novel pressure measurement technique is presented for wireless recording of time-averaged surface pressure distributions in wind tunnel surveys. An array of silicon micro-plate resonators acts as pressure sensing element. The pressure is recorded by measuring the sensor diaphragms' resonance frequency using optical interferometry. Dependent on the quasi-static deflection caused by a pressure load, the resonance frequency varies with an average pressure sensitivity of 3Hz/Pa in a frequency range between 30 and 150kHz. A smart-pixel CMOS camera, narrow-band acoustic noise excitation and a specific sensor surface structure allow for the interrogation of a large number of sensors in parallel without the need for alignment between sensor and detector. Experimental tests reveal increased sensing performance with acoustic excitation of the higher vibration modes