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Continuously variable W-band phase shifters based on MEMS-actuated conductive fingers

Psychogiou, Dimitra ; Li, Yunjia ; Hesselbarth, Jan ; Peroulis, Dimitrios ; Hierold, Christofer ; Hafner, Christian

In: International Journal of Microwave and Wireless Technologies, 2013, vol. 5, no. 4, p. 477-489

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    Titre
    • Continuously variable W-band phase shifters based on MEMS-actuated conductive fingers
    Auteur
    • Psychogiou, Dimitra. Department of Information Technology and Electrical Engineering, Laboratory for Electromagnetic Fields and Microwave Electronics, ETH Zurich, 8092 Zurich, Switzerland
    • Li, Yunjia. Department of Mechanical and Process Engineering, Group of Micro and Nanosystems, ETH Zurich, 8092 Zurich, Switzerland
    • Hesselbarth, Jan. Institute of Radio Frequency Technology, University of Stuttgart, Stuttgart 70569, Germany
    • Peroulis, Dimitrios. Birck Nanotechnology Center, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN 47907, USA
    • Hierold, Christofer. Department of Mechanical and Process Engineering, Group of Micro and Nanosystems, ETH Zurich, 8092 Zurich, Switzerland
    • Hafner, Christian. Department of Information Technology and Electrical Engineering, Laboratory for Electromagnetic Fields and Microwave Electronics, ETH Zurich, 8092 Zurich, Switzerland
    Type de document
    • Postprint
    Langue
    • Anglais
    Publié dans
    • International Journal of Microwave and Wireless Technologies, 2013, vol. 5, no. 4, p. 477-489. Cambridge University Press
    Autre version électronique
    Identifiant OAI-PMH
    • oai:doc.rero.ch:291348
    Summary
    This paper presents four continuously variable W-band phase shifters in terms of design, fabrication, and radiofrequency (RF) characterization. They are based on low-loss ridge waveguide resonators tuned by electrostatically actuated highly conductive rigid fingers with measured variable deflection between 0.3° and 8.25° (at a control voltage of 0-27.5 V). A transmission-type phase shifter based on a tunable highly coupled resonator has been manufactured and measured. It shows a maximum figure of merit (FOM) of 19.5°/dB and a transmission phase variation of 70° at 98.4GHz. The FOM and the transmission phase shift are increased to 55°/dB and 134°, respectively, by the effective coupling of two tunable resonances at the same device with a single tuning element. The FOM can be further improved for a tunable reflective-type phase shifter, consisting of a transmission-type phase shifter in series with a passive resonator and a waveguide short. Such a reflective-type phase shifter has been built and tested. It shows a maximum FOM of 101°/dB at 107.4GHz. Here, the maximum phase shift varied between 0° and 377° for fingers deflections between 0.3° and 8.25°