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    Université de Neuchâtel

    Simulation and design of a three axis navigation microsystem based on micromachined sensors

    Ansel, Y. ; Lerch, Philippe ; Renaud, Philippe ; Paoletti, F. ; Grétillat, M.-A. ; de Rooij, Nicolaas F. ; Schröpfer, G. ; Ballandras, S. ; de Labachelerie, M. ; Marselli, C. ; Amann, Hans Peter ; Pellandini, Fausto

    In: MicroSim II (Simutation and design of microsystems and microstructures), 1997, vol. 2, p. 107-116

    The project presented in this paper aims at defining the limits of microsystems through the realisation of a navigation system based on inertial microsensors. The work includes (i) design, fabrication, characterisation of accelerometers and angular rate sensors, (ii) development of techniques for simulation of sensor behaviour, and (iii) design of a sensor data processing system.