In: Physical Chemistry Chemical Physics, 2018, vol. 20, no. 17, p. 11692–11701
In a combined experimental and theoretical study we characterize dissociative electron attachment (DEA) to, and electronically excited states of, Fe(CO)5. Both are relevant for electron-induced degradation of Fe(CO)5. The strongest DEA channel is cleavage of one metal–ligand bond that leads to production of Fe(CO)4−. High- resolution spectra of Fe(CO)4− reveal fine structures at the...
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In: The Journal of Chemical Physics, 2018, vol. 148, no. 7, p. 074303
We report partial cross sections for electron attachment to c-C4F8O, a gas with promising technological applications in free-electron-rich environments. The dissociative electron attachment leads to a number of anionic fragments resulting from complex bond-breaking and bond-forming processes. However, the anion with the highest abundance is the non-dissociated (transient) parent anion which...
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In: Journal of Physics D: Applied Physics, 2016, vol. 49, no. 37, p. 375201
The electron attachment properties of octafluorotetrahydrofuran (c-C₄F₈O) are investigated using two complementary experimental setups. The attachment and ionization cross sections of c-C₄F₈O are measured using an electron beam experiment. The effective ionization rate coefficient, electron drift velocity and electron diffusion coefficient in c-C₄F₈O diluted to concentrations...
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In: The Journal of Physical Chemistry C, 2016, vol. 120, no. 19, p. 10667–10674
Electron induced chemistry of metal-containing precursor molecules is central in focused electron beam induced deposition (FEBID). While some elementary processes leading to precursor decomposition were quantitatively characterized, data for neutral dissociation is missing. We provide this data for the model precursor Pt(PF3)4 by using the available cross sections for electronic excitation...
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