Affiner les résultats

In situ monitoring of atomic layer epitaxy via optical ellipsometry

Lyzwa, Fryderyk ; Marsik, Premysl ; Roddatis, V. ; Bernhard, Christian ; Jungbauer, M. ; Moshnyaga, V.

In: Journal of Physics D: Applied Physics, 2018, vol. 51, no. 12, p. 125306

We report on the use of time-resolved optical ellipsometry to monitor the deposition of single atomic layers with subatomic sensitivity. Ruddlesden–Popper thin films of SrO(SrTiO3) n=4 were grown by means of metalorganic aerosol deposition in the atomic layer epitaxy mode on SrTiO3(1 0 0), LSAT(1 0 0) and DyScO3(1 1 0) substrates. The measured time dependences of ellipsometric...