Université de Neuchâtel

Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System

Akiyama, Terunobu ; Aeschimann, Laure ; Chantada, Laura ; de Rooij, Nicolaas F. ; Heinzelmann, Harry ; Herzig, Hans-Peter ; Manzardo, Omar ; Meister, André ; Polesel-Maris, Jérôme ; Pugin, Raphaël ; Staufer, Urs ; Vettiger, Peter

In: Japanese Journal of Applied Physics, 2007, vol. 46, no. 9B, p. 6458-6462

A concept of an array actuator that is used to control the tip–sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a 10×10 array actuator with 500 µm xy-pitches. The array actuator is made by slicing a bulk piezoceramic block. The obtained maximum actuation of a single...