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Université de Neuchâtel

Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System

Akiyama, Terunobu ; Aeschimann, Laure ; Chantada, Laura ; de Rooij, Nicolaas F. ; Heinzelmann, Harry ; Herzig, Hans-Peter ; Manzardo, Omar ; Meister, André ; Polesel-Maris, Jérôme ; Pugin, Raphaël ; Staufer, Urs ; Vettiger, Peter

In: Japanese Journal of Applied Physics, 2007, vol. 46, no. 9B, p. 6458-6462

A concept of an array actuator that is used to control the tip–sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a 10×10 array actuator with 500 µm xy-pitches. The array actuator is made by slicing a bulk piezoceramic block. The obtained maximum actuation of a single...

Université de Neuchâtel

Miniaturized time-scanning Fourier transform spectrometer based on silicon technology

Manzardo, Omar ; Marxer, Cornel R. ; de Rooij, Nicolaas F. ; Herzig, Hans-Peter

In: Optics Letters, 1999, vol. 24, no. 23, p. 1705-1707

We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of ±0.5 μm for a displacement of 38.5 μm . A method is presented to correct...

Université de Neuchâtel

Miniature lamellar grating interferometer based on silicon technology

Manzardo, Omar ; Michaely, Roland ; Schädelin, Felix ; Noell, Wilfried ; Overstolz, Thomas ; de Rooij, Nicolaas F. ; Herzig, Hans-Peter

In: Optics Letters, 2004, vol. 29, no. 13, p. 1437-1439

We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micromachining, particularly by silicon-on-insulator technology. For the first time to our knowledge, we measure the spectrum of an extended...

Université de Neuchâtel

Dispersive compact Fourier transform spectrometer for the visible

Manzardo, Omar ; Kipfer, Peter ; Herzig, Hans-Peter

In: Technical Digest Series, Fourier Transform Spectroscopy : New Methods and Applications, 1999, p. 165-167

A dispersive compact Fourier transform spectrometer is realized which operates in the visible wavelength range. No moving parts, no imaging system and compactness are the characteristics of this spectrometer. It is based on a novel beam splitter design, which reduces the influence of the size of the light source and therefore the spatial coherence requirements. The effect of dispersion due to an...

Université de Neuchâtel

Applications of SOI-based optical MEMS

Noell, Wilfried ; Clerc, Pierre-André ; Dellmann, Laurent ; Guldimann, Benedikt ; Herzig, Hans-Peter ; Manzardo, Omar ; Marxer, Cornel ; Dändliker, René ; de Rooij, Nicolaas F.

In: IEEE Journal of Selected Topics in Quantum Electronics, 2002, vol. 8, no. 1, p. 148-154

After microelectromechanical systems (MEMS) devices have been well established, components of higher complexity are now developed. Particularly, the combination with optical components has been very successful and have led to optical MEMS. The technology of choice for us is the silicon-on-insulator (SOI) technology, which has also been successfully used by other groups. The applications presented...

Université de Neuchâtel

Micro-sized spectrometer based on a lamellar grating interferometer

Manzardo, Omar ; Michaely, Roland ; Schadelin, Felix ; Herzig, Hans-Peter ; Noell, Wilfried ; Overstolz, Thomas ; de Rooij, Nicolaas F.

In: IEEE/LEOS (Lasers and Electro-Optics Society) International Conference on Optical MEMS, 2003, p. 175-176

A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl μ/m. The measured...

Université de Neuchâtel

Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics

Noell, Wilfried ; Sun, Winston ; de Rooij, Nicolaas F. ; Herzig, Hans-Peter ; Manzardo, Omar ; Dändliker, René

In: Lasers and Electro-Optics Society (LEOS). The 15th Annual Meeting of the IEEE, 2002, vol. 2, p. 580-581

Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very...

Université de Neuchâtel

Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

Montgomery, Paul C. ; Montaner, Denis ; Manzardo, Omar ; Herzig, Hans-Peter

In: Optical Micro- and Nanometrology in Manufacturing Technology (Proceedings of SPIE), 2004, vol. 5458, p. 34-42

White light scanning interference microscopy, with its high axial resolution, is particularly useful for the rapid 3D characterization of MOEMS micro-systems. Although this technique can be used for submicron critical dimension measurement on micron high microelectronic structures, recent tests using a standard system have revealed errors of up to 3 µm in the measurement of lateral position of...

Université de Neuchâtel

New design for an integrated Fourier transform spectrometer

Manzardo, Omar ; Herzig, Hans-Peter ; Guldimann, Benedikt ; Marxer, Cornel ; de Rooij, Nicolaas F.

In: MOEMS and Miniaturized Systems (Proceedings of SPIE), 2000, vol. 4178, p. 310-319

We present a miniaturized Fourier transform (FT) spectrometer based on silicon micromachined. The FTS is a Michelson interferometer with one scanning mirror. The motion of the mirror is carried out by a n electrostatic comb drive actuator. The mirror displacement is 39 micrometers and its reproducibility is +/- 13 nm, which leads to a resolution better than 10 nm in the visible wavelength range....