Université de Neuchâtel

Evaporation based micro pump integrated into a scanning force microscope probe

Heuck, F. ; Hug, T. ; Akiyama, Terunobu ; Frederix, P. L. T. M. ; Engel, A. ; Meister, André ; Heinzelmann, Harry ; de Rooij, Nicolaas F. ; Staufer, Urs

In: Microelectronic Engineering, 2008, vol. 85, no. 5-6, p. 1302-1305

A micro pump was integrated into a scanning force microscope probe for circulating liquid through its hollow cantilever and tip. The interior cross section of the cantilever was 2.25 μm × 3.75 μm. All fluidic parts were made of SiO2, while the tip apex was made of Si3N4. The key fabrication techniques were silicon wafer bonding and wet-oxidation. The pumping...

Université de Neuchâtel

Scanning probe arrays for life sciences and nanobiology applications

Aeschimann, Laure ; Meister, André ; Akiyama, Terunobu ; Chui, Benjamin W. ; Niedermann, Philippe ; Heinzelmann, Harry ; de Rooij, Nicolaas F. ; Staufer, Urs ; Vettiger, Peter

In: Microelectronic Engineering, 2006, vol. 83, no. 4-9, p. 1698-1701

Various 1D and 2D scanning probe arrays with integrated piezoresistive sensors have been developed in view of nanobiology and life science applications. For such applications, the experiments need usually to be performed under liquid conditions. The probe arrays have been fabricated by using silicon micromachining techniques and SOI wafers. For biological applications, when the cantilevers are...

Université de Neuchâtel

Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System

Akiyama, Terunobu ; Aeschimann, Laure ; Chantada, Laura ; de Rooij, Nicolaas F. ; Heinzelmann, Harry ; Herzig, Hans-Peter ; Manzardo, Omar ; Meister, André ; Polesel-Maris, Jérôme ; Pugin, Raphaël ; Staufer, Urs ; Vettiger, Peter

In: Japanese Journal of Applied Physics, 2007, vol. 46, no. 9B, p. 6458-6462

A concept of an array actuator that is used to control the tip–sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a 10×10 array actuator with 500 µm xy-pitches. The array actuator is made by slicing a bulk piezoceramic block. The obtained maximum actuation of a single...