Université de Neuchâtel

Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Dellmann, Laurent ; Roth, S. ; Beuret, C. ; Paratte, L. ; Racine, G.-A. ; Lorenz, H. ; Despont, M. ; Renaud, Philippe ; Vettiger, Peter ; de Rooij, Nicolaas F.

In: Microsystem Technologies, 1998, vol. 4, no. 3, p. 147-150

We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. Photopolymer structures have also been...

Université de Neuchâtel

Applications of SOI-based optical MEMS

Noell, Wilfried ; Clerc, Pierre-André ; Dellmann, Laurent ; Guldimann, Benedikt ; Herzig, Hans-Peter ; Manzardo, Omar ; Marxer, Cornel ; Dändliker, René ; de Rooij, Nicolaas F.

In: IEEE Journal of Selected Topics in Quantum Electronics, 2002, vol. 8, no. 1, p. 148-154

After microelectromechanical systems (MEMS) devices have been well established, components of higher complexity are now developed. Particularly, the combination with optical components has been very successful and have led to optical MEMS. The technology of choice for us is the silicon-on-insulator (SOI) technology, which has also been successfully used by other groups. The applications presented...