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Université de Neuchâtel

Thermally activated solvent bonding of polymers

Ng, S. H. ; Tjeung, R. T. ; Wang, Z. F. ; Lu, A. C. W. ; Rodriguez, I. ; de Rooij, Nicolaas F.

In: Microsystem Technologies, 2008, vol. 14, no. 6, p. 753-759

We present a thermally activated solvent bonding technique for the formation of embedded microstructures in polymer. It is based on the temperature dependent solubility of polymer in a liquid that is not a solvent at room temperature. With thermal activation, the liquid is transformed into a solvent of the polymer, creating a bonding capability through segmental or chain interdiffusion at the...

Université de Neuchâtel

Development of a multi-layer microelectrofluidic platform

Ng, S. H. ; Wang, Z. F. ; Tjeung, R. T. ; de Rooij, Nicolaas F.

In: Microsystem Technologies, 2007, vol. 13, no. 11-12, p. 1509-1515

We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. Photopolymer structures have also been...