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Optically tunable microcavity in a planar photonic crystal silicon waveguide buried in oxide

Märki, Iwan ; Salt, Martin Guy ; Herzig, Hans-Peter ; Stanley, Ross ; Melhaoui, L. El. ; Lyan, P. ; Fedeli, J. M.

In: Optics Letters, 2006, vol. 31, no. 4, p. 513-515

We present all-optical tuning and switching of a microcavity inside a two-dimensional photonic crystal waveguide. The photonic crystal structure is fabricated in silicon-on-insulator using complementary metal-oxide semiconductor processing techniques based on deep ultraviolet lithography and is completely buried in a silicon dioxide cladding that provides protection from the environment. By...