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Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Dellmann, Laurent ; Roth, S. ; Beuret, C. ; Paratte, L. ; Racine, G.-A. ; Lorenz, H. ; Despont, M. ; Renaud, Philippe ; Vettiger, Peter ; de Rooij, Nicolaas F.

In: Microsystem Technologies, 1998, vol. 4, no. 3, p. 147-150

We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. Photopolymer structures have also been...