Université de Neuchâtel

Surface profiles of reflow microlenses under the influence of surface tension and gravity

Schilling, Andreas ; Merz, Roman ; Ossmann, Christian ; Herzig, Hans-Peter

In: Optical Engineering, 2000, vol. 39, no. 8, p. 2171-2176

We present a finite-element method to calculate 3-D surface profiles of refractive microlenses fabricated by melting-resist technology (reflow technique). The geometry of the microlenses can be arbitrary. Surface tension and gravity are taken into account. Gravity can have an advantageous influence on the profile form, so that smaller focal spots can be achieved. A simple scaling law is given to...