Université de Neuchâtel

Micro-optical elements with arbitrary surfaces

Schilling, Andreas ; Nussbaum, Philippe ; Philipoussis, Irene ; Herzig, Hans-Peter ; Rossi, Markus ; Kley, Ernst-Bernhard

In: Diffractive Optics and Micro-Optics (DOMO), 2000, p. 234-236

We present a comparison of three different technologies for the fabrication of micro-optical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography incombination with reactive ion etching, and graytone lithography.

Université de Neuchâtel

Microlens lithography: A new approach for large display fabrication

Völkel, Reinhard ; Herzig, Hans-Peter ; Nussbaum, Philippe ; Singer, Wolfgang ; Dändliker, René ; Hugle, William B.

In: Microelectronic Engineering, 1996, vol. 30, no. 1-4, p. 107-110

Microlens lithography is a new lithographic method, that uses microlens arrays to image a lithographic mask onto a substrate layer. Microlens lithography provides photolithography at a moderate resolution for an almost unlimited area. The imaging system consists of stacked microlens arrays forming an array of micro-objectives. Each micro-objective images a small part of the mask pattern, the...

Université de Neuchâtel

Potential of dry etching for the fabrication of fused silica micro-optical elements

Nussbaum, Philippe ; Weible, Kenneth J. ; Rossi, Markus ; Herzig, Hans-Peter

In: Micromachine Technology for Diffractive and Holographic Optics (Proceedings of SPIE), 1999, vol. 3879, p. 63-70

We report on recent progress in the fabrication of fused silica micro-optical elements, such as blazed gratings, refractive microlenses and microprisms. The elements are first made in photoresist and then they are transferred into fused silica by reactive ion etching. High selectivity etching is needed to realize structures with a high aspect ratio. Results are shown using various metallic etch...

Université de Neuchâtel

Microlens array imaging system for photolithography

Völkel, Reinhard ; Herzig, Hans-Peter ; Nussbaum, Philippe ; Dändliker, René ; Hugle, William B.

In: Optical Engineering, 1999, vol. 35, no. 1, p. 3323-3330

A micro-optical system is proposed that uses a stack of four microlens arrays for 1:1 imaging of extended object planes. The system is based on the concept of multiple-aperture imaging. A compact system is presented that is remarkable in that it provides a diffraction-limited resolution of 3 µm for unlimited object and image areas. Resolution of 5 µm has been demonstrated for an area of 20 ×...

Université de Neuchâtel

Simple technique for replication of micro-optical elements

Nussbaum, Philippe ; Philipoussis, Irène ; Husser, Aline ; Herzig, Hans-Peter

In: Optical Engineering, 1998, vol. 37, no. 6, p. 1804-1808

A simple technique for the replication of micro-optical elements is presented. Elastomeric material is used to realize a negative mold of the original optical element and UV-curing adhesive is used to make the replicated copy. Replicated elements, such as refractive and diffractive micro-optical elements, are produced. The refractive microlenses have a diameter of 970 µm and a height of 79 µm...

Université de Neuchâtel

Design, fabrication and testing of microlens arrays for sensors and microsystems

Nussbaum, Philippe ; Völkel, R. ; Herzig, Hans-Peter ; Eisner, M. ; Haselbeck, S.

In: Pure and Applied Optics: Journal of the European Optical Society Part A, 1997, vol. 6, no. 6, p. 617-636

We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.

Université de Neuchâtel

Miniaturized, focusing fan-out elements: design, fabrication and characterization

Schilling, Andreas ; Nussbaum, Philippe ; Ossmann, Ch. ; Traut, S. ; Rossi, Markus ; Schift, H. ; Herzig, Hans-Peter

In: Journal of Optics A: Pure and Applied Optics, 1999, vol. 1, no. 2, p. 244-248

We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the...

Université de Neuchâtel

Fabrication technologies for micro-optical elements with arbitrary surfaces

Schilling, Andreas ; Nussbaum, Philippe ; Philipoussis, Irene ; Herzig, Hans-Peter ; Stauffer, Laurent ; Rossi, Markus ; Kley, Ernst-Bernhard

In: Micromachining Technology for Micro-Optics (Proceedings of SPIE), 2000, vol. 4179, p. 65-72

We present a comparison of three different technologies for the fabrication of micro-optical elements with arbitrary surfaces. We used direct laser writing in photoresist, binary mask lithography in combination with reactive ion etching in fused silica, and High-Energy- Beam-Sensitive (HEBS) glass graytone lithography in photoresist. We analyzed the efficiencies and the deflection angles of...