Université de Neuchâtel

Optically tunable microcavity in a planar photonic crystal silicon waveguide buried in oxide

Märki, Iwan ; Salt, Martin Guy ; Herzig, Hans-Peter ; Stanley, Ross ; Melhaoui, L. El. ; Lyan, P. ; Fedeli, J. M.

In: Optics Letters, 2006, vol. 31, no. 4, p. 513-515

We present all-optical tuning and switching of a microcavity inside a two-dimensional photonic crystal waveguide. The photonic crystal structure is fabricated in silicon-on-insulator using complementary metal-oxide semiconductor processing techniques based on deep ultraviolet lithography and is completely buried in a silicon dioxide cladding that provides protection from the environment. By...

Université de Neuchâtel

Characterization of buried photonic crystal waveguides and microcavities fabricated by deep ultraviolet lithography

Märki, Iwan ; Salt, Martin Guy ; Herzig, Hans-Peter ; Stanley, Ross ; El Melhaoui, L. ; Lyan, P. ; Fedeli, J. M.

In: Applied Physics Letters, 2005, vol. 98, no. 013103, p. 1-4

We present results of the optical characterization of silicon photonic crystal waveguides and microcavities that are completely buried in a silicon dioxide cladding and are fabricated by deep ultraviolet (UV) lithography. The advantages of buried waveguides and deep UV lithography are discussed. Transmission spectra and loss factors for photonic crystal waveguides, as well as quality factors for...