Université de Neuchâtel

Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components

Dellmann, Laurent ; Roth, S. ; Beuret, C. ; Paratte, L. ; Racine, G.-A. ; Lorenz, H. ; Despont, M. ; Renaud, Philippe ; Vettiger, Peter ; de Rooij, Nicolaas F.

In: Microsystem Technologies, 1998, vol. 4, no. 3, p. 147-150

We report on recent advances in micro fabrication technology using micromoulding and high-aspect ratio structuring of photopolymer. The direct application is the realization of components for millimeter-size, ultrasonic piezoelectric motors. A new fabrication process using a thick epoxy-based material (SU-8) and the electroplating of nickel is demonstrated. Photopolymer structures have also been...

Université de Neuchâtel

Microfabrication of Pt-tip microelectrodes

Thiébaud, P. ; Beuret, C. ; de Rooij, Nicolaas F. ; Koudelka-Hep, Milena

In: Sensors and Actuators B : Chemical, 2000, vol. 70, no. 1-3, p. 51-56

This paper describes the realization of Pt-tip microelectrodes by using microfabrication technology. The total height of these microelectrodes is 47 μm, of which the upper 20 or 2 μm, respectively, are exposed Pt tips with a curvature of 0.5 μm. In order to verify the tip opening, an electrochemical plating of thin-film Pt was used. This improves the visualisation of the tips in an SEM and...