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Université de Fribourg

Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

Kayser, Yves ; Hönicke, Philipp ; Banaś, Dariusz ; Dousse, Jean-Claude ; Hoszowska, Joanna ; Jagodziński, Paweł ; Kubala-Kukuś, Aldona ; Nowak, Stanisław H. ; Pajek, Marek

In: Journal of Analytical Atomic Spectrometry, 2015, p. -

Depth-profiling measurements by means of synchrotron radiation based grazing XRF techniques, i.e., grazing emission X-ray fluorescence (GEXRF) and grazing incidence X-ray fluorescence (GIXRF), present a promising approach for the non-destructive, sub-nanometer scale precision characterization of ultra shallow ion-implantations. The nanometer resolution is of importance with respect to actual...

Université de Fribourg

High-energy-resolution grazing emission X-ray fluorescence applied to the characterization of thin Al films on Si

Kayser, Yves ; Szlachetko, Jakoub ; Banaś, D. ; Cao, Wei ; Dousse, Jean-Claude ; Hoszowska, Joanna ; Kubala-Kukuś, A. ; Pajek, M.

In: Spectrochimica Acta Part B: Atomic Spectroscopy, 2014, vol. 88, p. 136–149

The grazing emission X-ray fluorescence (GEXRF) technique was applied to the analysis of different Al films, with nominal thicknesses in the range of 1 nm to 150 nm, on Si wafers. In GEXRF the sample volume from which the fluorescence intensity is detected is restricted to a near-surface region whose thickness can be tuned by varying the observation angle. This is possible because of the...

Université de Fribourg

Grazing incidence X-ray fluorescence of periodic structures – a comparison between X-ray standing waves and geometrical optics calculations

Reinhardt, Falk ; Nowak, Stanisław H. ; Beckhoff, Burkhard ; Dousse, Jean-Claude ; Schoengen, Max

In: Journal of Analytical Atomic Spectrometry, 2014, vol. 29, no. 10, p. 1778–1784

Grazing incidence X-ray fluorescence spectra of nano-scaled periodic line structures were recorded at the four crystal monochromator beamline in the laboratory of the Physikalisch-Technische Bundesanstalt at the synchrotron radiation facility BESSY II. For different tilt angles between the lines and the plane of incidence of the monochromatic synchrotron radiation, spectral features are observed...

Université de Fribourg

Characterization of ultra-shallow aluminum implants in silicon by grazing incidence and grazing emission X-ray fluorescence spectroscopy

Hönicke, Philipp ; Kayser, Yves ; Beckhoff, B. ; Müller, M. ; Dousse, Jean-Claude ; Hoszowska, Joanna ; Nowak, Stanisław H..

In: Journal of Analytical Atomic Spectrometry, 2014, vol. 27, no. 9, p. 1432–1438

In this work two synchrotron radiation-based depth-sensitive X-ray fluorescence techniques, grazing incidence X-ray fluorescence (GIXRF) and grazing emission X-ray fluorescence (GEXRF), are compared and their potential for non-destructive depth-profiling applications is investigated. The depth-profiling capabilities of the two methods are illustrated for five aluminum-implanted silicon wafers all...

Université de Fribourg

High-resolution x-ray-emission study of 1s4p and 1s3d two-electron photoexcitations in Kr

Kavčič, Matjaz ; Žitnik, M. ; Sokaras, D. ; Weng, T.-C. ; Alonso-Mori, R. ; Nordlund, D. ; Dousse, Jean-Claude ; Hoszowska, Joanna

In: Physical Review A, 2014, vol. 90, no. 2, p. 022513

High-energy-resolution photoexcited KN2,3 x-ray-emission measurements were carried out on krypton with the excitation energy tuned around the 1s4p and 1s3d double-excitation thresholds. Comprehensive two-dimensional resonant inelastic x-ray-scattering maps were recorded for the range of excitation and emission energies corresponding to both types of double excitations. The double-excitation...

Université de Fribourg

High energy resolution off-resonant spectroscopy for X-ray absorption spectra free of self-absorption effects

Błachucki, Wojciech Maria ; Szlachetko, Jakoub ; Hoszowska, Joanna ; Dousse, Jean-Claude ; Kayser, Yves ; Nachtegaal, M. ; Sá, J.

In: Physical Review Letters, 2014, vol. 112, no. 17, p. 173003

X-ray emission spectra recorded in the off-resonant regime carry information on the density of unoccupied states. It is known that by employing the Kramers-Heisenberg formalism, the high energy resolution off-resonant spectroscopy (HEROS) is equivalent to the x-ray absorption spectroscopy (XAS) technique and provides the same electronic state information. Moreover, in the present Letter we...

Université de Fribourg

Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces

Nowak, Stanislaw H. ; Banaś, D. ; Błachucki, Wojciech Maria ; Cao, Wei ; Dousse, Jean-Claude ; Hönicke, P. ; Hoszowska, Joanna ; Jabłoński, Ł. ; Kayser, Yves ; Kubala-Kukuś, A. ; Pajek, M. ; Reinhardt, F. ; Savu, A.V. ; Szlachetko, Jakoub

In: Spectrochimica Acta Part B: Atomic Spectroscopy, 2014, vol. 98, p. 65–75

Various 3-dimensional nano-scaled periodic structures with different configurations and periods deposited on the surface of silicon and silica substrates were investigated by means of the grazing incidence and grazing emission X-ray fluorescence techniques. Apart from the characteristics which are typical for particle- and layer-like samples, the measured angular intensity profiles show...

Université de Fribourg

Real time determination of the electronic structure of unstable reaction intermediates during Au₂O₃ Reduction

Szlachetko, Jakub ; Sá, Jacinto ; Nachtegaal, Maarten ; Hartfelder, Urs ; Dousse, Jean-Claude ; Hoszowska, Joanna ; Fernandes, Daniel Luis Abreu ; Shi, Hongqing ; Stampfl, Catherine

In: The Journal of Physical Chemistry Letters, 2014, vol. 5, no. 1, p. 80–84

Chemical reactions are always associated with electronic structure changes of the involved chemical species. Determining the electronic configuration of an atom allows probing its chemical state and gives understanding of the reaction pathways. However, often the reactions are too complex and too fast to be measured at in situ conditions due to slow and/or insensitive experimental techniques. A...

Université de Fribourg

Laboratory-based micro-X-ray fluorescence setup using a von Hamos crystal spectrometer and a focused beam X-ray tube

Kayser, Yves ; Błachucki, W. ; Dousse, Jean-Claude ; Hoszowska, Joanna ; Neff, M. ; Romano, V.

In: Review of Scientific Instruments, 2014, vol. 85, no. 4, p. 043101

The high-resolution von Hamos bent crystal spectrometer of the University of Fribourg was upgraded with a focused X-ray beam source with the aim of performing micro-sized X-ray fluorescence (XRF) measurements in the laboratory. The focused X-ray beam source integrates a collimating optics mounted on a low-power micro-spot X-ray tube and a focusing polycapillary half-lens placed in front of the...

Université de Fribourg

The electronic structure of matter probed with a single femtosecond hard x-ray pulse

Szlachetko, Jakub ; Milne, a), C. J. ; Hoszowska, Joanna ; Dousse, Jean-Claude ; Błachucki, W. ; Sà, J. ; Kayser, Yves ; Messerschmidt, M. ; Abela, R. ; Boutet, S. ; David, Christian ; Williams, G. ; Pajek, M. ; Patterson, B. D. ; Smolentsev, G. ; Bokhoven, J. A. van ; Nachtegaal, M.

In: Structural Dynamics, 2014, vol. 1, no. 2, p. 021101

Physical, biological, and chemical transformations are initiated by changes in the electronic configuration of the species involved. These electronic changes occur on the timescales of attoseconds (10−18 s) to femtoseconds (10−15 s) and drive all subsequent electronic reorganization as the system moves to a new equilibrium or quasi-equilibrium state. The ability to detect the dynamics of...