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Observation of ultralow-level Al impurities on a silicon surface by high-resolution grazing emission x-ray fluorescence excited by synchrotron radiation

Kubala-Kukus, A. ; Banas, D. ; Cao, Wei ; Dousse, Jean-Claude ; Hoszowska, Joanna ; Kayser, Yves ; Pajek, M. ; Salomé, M. ; Susini, J. ; Szlachetko, Jakub ; Szlachetko, Monika

In: Physical Review B, 2009, vol. 11, p. 113305

We demonstrate that ultralow-level Al impurities on a silicon surface can be measured by using the high-resolution grazing emission x-ray fluorescence (GEXRF) technique combined with synchrotron-radiation excitation. An Al-impurity level of about 10¹² atoms/cm² was reached by observing the Al Kα x-ray fluorescence in the resonant Raman-scattering background-“free” regime by...

L-subshell Coster-Kronig yields of palladium determined via synchrotron-radiation-based high-resolution x-ray spectroscopy

Cao, Wei ; Hoszowska, Joanna ; Dousse, Jean-Claude ; Kayser, Yves ; Kavčič, M. ; Žitnik, M. ; Bučar, K. ; Mihelič, A. ; Szlachetko, Jakub ; Słabkowska, K.

In: Physical Review A, 2009, vol. 80, no. 1, p. 012512