Université de Neuchâtel

Microlens array imaging system for photolithography

Völkel, Reinhard ; Herzig, Hans-Peter ; Nussbaum, Philippe ; Dändliker, René ; Hugle, William B.

In: Optical Engineering, 1999, vol. 35, no. 1, p. 3323-3330

A micro-optical system is proposed that uses a stack of four microlens arrays for 1:1 imaging of extended object planes. The system is based on the concept of multiple-aperture imaging. A compact system is presented that is remarkable in that it provides a diffraction-limited resolution of 3 µm for unlimited object and image areas. Resolution of 5 µm has been demonstrated for an area of 20 ×...

Université de Neuchâtel

Fabrication technologies for micro-optical elements with arbitrary surfaces

Schilling, Andreas ; Nussbaum, Philippe ; Philipoussis, Irene ; Herzig, Hans-Peter ; Stauffer, Laurent ; Rossi, Markus ; Kley, Ernst-Bernhard

In: Micromachining Technology for Micro-Optics (Proceedings of SPIE), 2000, vol. 4179, p. 65-72

We present a comparison of three different technologies for the fabrication of micro-optical elements with arbitrary surfaces. We used direct laser writing in photoresist, binary mask lithography in combination with reactive ion etching in fused silica, and High-Energy- Beam-Sensitive (HEBS) glass graytone lithography in photoresist. We analyzed the efficiencies and the deflection angles of...