Université de Neuchâtel

High-carrier-frequency fan-out gratings fabricated by total internal reflection holographic lithography

Ehbets, Peter ; Herzig, Hans-Peter ; Kuittinen, Markku ; Clube, Francis S. M. ; Darbellay, Yves

In: Optical Engineering, 1995, vol. 34, no. 8, p. 2377-2383

Total internal reflection (TIP) holographic lithography is applied to the fabrication of binary diffractive optical elements with submicrometer surface relief features. The recording conditions for the intermediate TIR volume hologram, used for high-resolution proximity printing, are discussed. In particular, the fabrication of efficient high-carrier-frequency fan-out gratings is considered and...

Université de Neuchâtel

Miniaturized, focusing fan-out elements: design, fabrication and characterization

Schilling, Andreas ; Nussbaum, Philippe ; Ossmann, Ch. ; Traut, S. ; Rossi, Markus ; Schift, H. ; Herzig, Hans-Peter

In: Journal of Optics A: Pure and Applied Optics, 1999, vol. 1, no. 2, p. 244-248

We present miniaturized, focusing fan-out elements. The new micro-optical elements were fabricated using different technologies: double-sided injection moulding in polycarbonate, double-sided photolithography with subsequent transfer in quartz and direct laser writing in photoresist. The fan-out elements were characterized by measuring their efficiency and uniformity, the surface profiles of the...