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Université de Neuchâtel

Dynamic behavior of the tuning fork AFM probe

Bayat, Dara ; Akiyama, Terunobu ; de Rooij, Nicolaas F. ; Staufer, Urs

In: Microelectronic Engineering, 2008, vol. 85, no. 5-6, p. 1018-1021

We recently introduced a new self-actuating and self-sensing atomic force microscope (AFM) probe based on a quartz tuning fork and a micro-fabricated cantilever. This system has two degrees of freedom, associated with its two components. We developed a model for describing how the sample-tip interaction is transduced to the tuning fork. It is based on two coupled spring-mass systems. In a first...