Université de Neuchâtel

Development of 1 × 4 MEMS-based optical switch

Wang, Z. F. ; Cao, W. ; Shan, X. C. ; Xu, J. F. ; Lim, S. P. ; Noell, Wilfried ; de Rooij, Nicolaas F.

In: Sensors and Actuators A: Physical, 2004, vol. 114, no. 1, p. 80-87

In this paper, a novel 1×4 optical switch has been developed based on the DRIE vertical mirror technology. Three microactuated vertical silicon mirrors and five tapered/lensed fibers were employed to perform the 1×4 switch function. The comb actuators drive the mirrors linearly into the optical path due to the electrostatic force. The tilted mirror with an angle of 22.5° made the layout of the...

Université de Neuchâtel

Miniature lamellar grating interferometer based on silicon technology

Manzardo, Omar ; Michaely, Roland ; Schädelin, Felix ; Noell, Wilfried ; Overstolz, Thomas ; de Rooij, Nicolaas F. ; Herzig, Hans-Peter

In: Optics Letters, 2004, vol. 29, no. 13, p. 1437-1439

We present a lamellar grating interferometer realized with microelectromechanical system technology. It is used as a time-scanning Fourier-transform spectrometer. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon micromachining, particularly by silicon-on-insulator technology. For the first time to our knowledge, we measure the spectrum of an extended...

Université de Neuchâtel

Applications of SOI-based optical MEMS

Noell, Wilfried ; Clerc, Pierre-André ; Dellmann, Laurent ; Guldimann, Benedikt ; Herzig, Hans-Peter ; Manzardo, Omar ; Marxer, Cornel ; Dändliker, René ; de Rooij, Nicolaas F.

In: IEEE Journal of Selected Topics in Quantum Electronics, 2002, vol. 8, no. 1, p. 148-154

After microelectromechanical systems (MEMS) devices have been well established, components of higher complexity are now developed. Particularly, the combination with optical components has been very successful and have led to optical MEMS. The technology of choice for us is the silicon-on-insulator (SOI) technology, which has also been successfully used by other groups. The applications presented...

Université de Neuchâtel

Micro-sized spectrometer based on a lamellar grating interferometer

Manzardo, Omar ; Michaely, Roland ; Schadelin, Felix ; Herzig, Hans-Peter ; Noell, Wilfried ; Overstolz, Thomas ; de Rooij, Nicolaas F.

In: IEEE/LEOS (Lasers and Electro-Optics Society) International Conference on Optical MEMS, 2003, p. 175-176

A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl μ/m. The measured...

Université de Neuchâtel

Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics

Noell, Wilfried ; Sun, Winston ; de Rooij, Nicolaas F. ; Herzig, Hans-Peter ; Manzardo, Omar ; Dändliker, René

In: Lasers and Electro-Optics Society (LEOS). The 15th Annual Meeting of the IEEE, 2002, vol. 2, p. 580-581

Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very...