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Université de Neuchâtel

Microfabricated alkali vapor cell with anti-relaxation wall coating

Straessle, Rahel ; Pellaton, Matthieu ; Affolderbach, Christoph ; Pétremand, Yves ; Briand, Danick ; Mileti, Gaetano ; de Rooij, Nicolas F

In: Applied Physics Letters, 2014/105/4/043502/1-4

We present a microfabricated alkali vapor cell equipped with an anti-relaxation wall coating. The anti-relaxation coating used is octadecyltrichlorosilane and the cell was sealed by thin-film indium-bonding at a low temperature of 140 °C. The cell body is made of silicon and Pyrex and features a double-chamber design. Depolarizing properties due to liquid Rb droplets are avoided by confining the...

Université de Neuchâtel

Microfabricated rubidium vapour cell with a thick glass core for small-scale atomic clock applications

Pétremand, Yves ; Affolderbach, Christoph ; Straessle, Rahel ; Pellaton, Matthieu ; Briand, Danick ; Mileti, Gaetano ; de Rooij, Nicolaas F.

In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2012, vol. 22, no. 2, p. 025013 (8pp)

This paper presents a new fabrication method to manufacture alkali reference cells having dimensions larger than standard micromachined cells and smaller than glass-blown ones, for use in compact atomic devices such as vapour-cell atomic clocks or magnetometers. The technology is based on anodic bonding of silicon and relatively thick glass wafers and fills a gap in cell sizes and technologies...

Université de Neuchâtel

Low-temperature indium-bonded alkali vapor cell for chip-scale atomic clocks

Straessle, Rahel ; Pellaton, Matthieu Lucien ; Affolderbach, Christoph ; Pétremand, Yves ; Briand, Danick ; Mileti, Gaetano ; de Rooij, Nicolaas F

In: Journal of Applied Physics, 2013/113/6/064501/1-8

A low-temperature sealing technique for micro-fabricated alkali vapor cells for chip-scale atomic clock applications is developed and evaluated. A thin-film indium bonding technique was used for sealing the cells at temperatures of ≤140 °C. These sealing temperatures are much lower than those reported for other approaches, and make the technique highly interesting for future micro-fabricated...

Université de Neuchâtel

Matrix of 10 × 10 addressed solid propellant microthrusters: Review of the technologies

Rossi, Carole ; Briand, Danick ; Dumonteuil, Maxime ; Camps, Thierry ; Pham, Phuong Quyên ; de Rooij, Nicolaas F.

In: Sensors and Actuators A: Physical, 2006, vol. 126, no. 1, p. 241-252

An EC funded MicroPyros project has permitted to develop the technologies to fabricate, assemble and command solid propellant microthrusters arrays for thrusts of a few of milli Newtons The prototype built for space application has 100 individually addressed ∅ 1.5 mm × 1.5 mm thrusters on 576 mm2. Nozzles’ throats are 250 μm and 500 μm. This paper reviews the prototype...

Université de Neuchâtel

Microhotplates with TiN heaters

Creemer, J.F. ; Briand, Danick ; Zandbergen, H.W. ; van der Vlist, W. ; de Boer, C.R. ; de Rooij, Nicolaas F. ; Sarro, P.M.

In: Sensors and Actuators A: Physical, 2008, vol. 148, no. 2, p. 416-421

Titanium nitride (TiN) has been investigated as a heater material for microhotplates and microreactors. TiN is available in many CMOS processes, unlike many other microheater materials. In addition, TiN has a very high melting point (2950 °C) meaning that it is stable up to higher temperatures than platinum (Pt) and polysilicon. For the first time, TiN is tested inside a conventional membrane of...

Université de Neuchâtel

Reliability improvement of suspended platinum-based micro-heating elements

Courbat, Jérôme ; Briand, Danick ; de Rooij, Nicolaas F.

In: Sensors and Actuators A: Physical, 2008, vol. 142, no. 1, p. 284-291

Micro-hotplates consisting of a platinum-based heating element embedded in two low-stress silicon nitride layers were fabricated. In this communication, we report on the composition of the heater and its influence on both the micro-hotplate's life expectancy and the highest reachable operating power. These factors were characterized by measuring the deformation of the membrane, by ramping up the...

Université de Neuchâtel

Reliability of freestanding polysilicon microheaters to be used as igniters in solid propellant microthrusters

Briand, Danick ; Pham, Phuong Quyên ; de Rooij, Nicolaas F.

In: Sensors and Actuators A: Physical, 2006, vol. 135, no. 2, p. 329-336

This paper presents the design, fabrication and characterisation of surface micromachined polysilicon microheaters to be used as microigniters for micropropulsion applications. The microigniters are heated up by Joule effect and the thermal losses through the substrate are minimised by suspending the microheaters above the substrate. The developed process was compatible with the integration of...

Université de Neuchâtel

Application of carbon nano-powders for a gas micro-preconcentrator

Pijolat, C. ; Camara, M. ; Courbat, Jérôme ; Viricelle, J.-P. ; Briand, Danick ; de Rooij, Nicolaas F.

In: Sensors and Actuators B: Chemical, 2007, vol. 127, no. 1, p. 179-185

This paper presents a feasibility study on the development of a gas preconcentrator based on micro-reactor technology on silicon. The objectives are to select a gas adsorbent material, to produce a silicon micro-reactor with an integrated heater, and finally to introduce the most suitable adsorbent into the micro-channels of the device. Preliminary results related to the characterization of a...

Université de Neuchâtel

Compatibility of screen-printing technology with micro-hotplate for gas sensor and solid oxide micro fuel cell development

Viricelle, J.-P. ; Pijolat, C. ; Riviere. B. ; Rotureau. D. ; Briand, Danick ; de Rooij, Nicolaas F.

In: Sensors and Actuators B: Chemical, 2006, vol. 118, no. 1-2, p. 263-268

Screen-printing technology is widely used in the field of gas sensors and can also be used to fabricate electrodes for solid oxide fuel cell (SOFC). The compatibility of this technique with micro-hotplate is studied to produce micro sensors and micro SOFC. For sensors application, development of inks containing precursor of sensing element allows to decrease annealing temperature and to improve...

Université de Neuchâtel

Bonding properties of metals anodically bonded to glass

Briand, Danick ; Weber, Patrick ; de Rooij, Nicolaas F.

In: Sensors and Actuators A: Physical, 2004, vol. 114, no. 2-3, p. 543-549

Anodically bonded Pyrex-/Metal double stack were investigated for applications in the sensor encapsulation field. The use of metals can increase the robustness of the packaging and eliminate the use of glue. Titanium anodically bonded to glass can lead to biocompatible systems The anodic bonding of metallic sheets of Invar, Kovar, Alloy 42 and titanium to ion-containing glasses, Pyrex and...