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Université de Neuchâtel

Fabrication and electroosmotic flow measurements in micro- and nanofluidic channels

Hug, Thomas S. ; de Rooij, Nicolaas F. ; Staufer, Urs

In: Microfluidics and Nanofluidics, 2006, vol. 2, no. 2, p. 117-124

An easy method for fabricating micro- and nanofluidic channels, entirely made of a thermally grown silicon dioxide is presented. The nanochannels are up to 1-mm long and have widths and heights down to 200 nm, whereas the microfluidic channels are 20-μm wide and 4.8-μm high. The nanochannels are created at the interface of two silicon wafers. Their fabrication is based on the expansion of...

Université de Neuchâtel

Filling kinetics of liquids in nanochannels as narrow as 27 nm by capillary force

Han, Anpan ; Mondin, Giampietro ; Hegelbach, Nicole G. ; de Rooij, Nicolaas F. ; Staufer, Urs

In: Journal of Colloid and Interface Science, 2006, vol. 293, no. 1, p. 151-157

We report the filling kinetics of different liquids in nanofabricated capillaries with rectangular cross-section by capillary force. Three sets of channels with different geometry were employed for the experiments. The smallest dimension of the channel cross-section was respectively 27, 50, and 73 nm. Ethanol, isopropanol, water and binary mixtures of ethanol and water spontaneously filled...

Université de Neuchâtel

Micro- and nanosystems for biology and medicine

Staufer, Urs ; Akiyama, Terunobu ; Gullo, M. R. ; Han, A. ; Imer, Raphaël ; de Rooij, Nicolaas F. ; Aebi, Ueli ; Engel, A. ; Frederix, P. L. T. M. ; Stolz, Martin ; Friederich, Niklaus F. ; Wirz, Dieter

In: Microelectronic Engineering, 2007, vol. 84, no. 5-8, p. 1681-1684

The development of new tools and instruments for biomedical applications based on nano- (NEMS) or microelectromechanical systems technology (MEMS) are bridging the gap between the macro- and the nano-world. The well mastered microtechnique allows controlling many parameters of these instruments, which is essential for conducting reproducible and repeatable experiments in the life sciences....

Université de Neuchâtel

Evaporation based micro pump integrated into a scanning force microscope probe

Heuck, F. ; Hug, T. ; Akiyama, Terunobu ; Frederix, P. L. T. M. ; Engel, A. ; Meister, André ; Heinzelmann, Harry ; de Rooij, Nicolaas F. ; Staufer, Urs

In: Microelectronic Engineering, 2008, vol. 85, no. 5-6, p. 1302-1305

A micro pump was integrated into a scanning force microscope probe for circulating liquid through its hollow cantilever and tip. The interior cross section of the cantilever was 2.25 μm × 3.75 μm. All fluidic parts were made of SiO2, while the tip apex was made of Si3N4. The key fabrication techniques were silicon wafer bonding and wet-oxidation. The pumping...

Université de Neuchâtel

Nanofabrication of protein-patterned substrates for future cell adhesion experiments

Künzi, P.A. ; Lussi, J. ; Aeschimann, Laure ; Danuser, G. ; Textor, M. ; de Rooij, Nicolaas F. ; Staufer, Urs

In: Microelectronic Engineering, 2005, vol. 78-79, p. 582-586

A method for fabricating sub-micrometer size adhesion sites for future experiments in cell biology is presented. Glass substrates were coated with a thin layer of InSnO and SiO2. The SiO2 was structured by means of electron beam lithography and reactive ion etching, exposing sub-micrometer patches of the underlying InSnO. Dodecylphosphate, to which proteins can bind, was...

Université de Neuchâtel

Towards a planar sample support for in situ experiments in structural biology

Gullo, M. R. ; Akiyama, Terunobu ; Frederix, P. L. T. M. ; Tonin, A. ; Staufer, Urs ; Engel, A. ; de Rooij, Nicolaas F.

In: Microelectronic Engineering, 2005, vol. 78-79, p. 571-574

We report about the development of a planar support for biological samples. The aim is to combine AFM and patch-clamp measurements, in order to perform simultaneous measurements of topography and electrical properties of biological membranes. Sub-micrometer apertures have been fabricated using standard MEMS techniques. The electrical quality of the support has been experimentally assessed.

Université de Neuchâtel

Dynamic behavior of the tuning fork AFM probe

Bayat, Dara ; Akiyama, Terunobu ; de Rooij, Nicolaas F. ; Staufer, Urs

In: Microelectronic Engineering, 2008, vol. 85, no. 5-6, p. 1018-1021

We recently introduced a new self-actuating and self-sensing atomic force microscope (AFM) probe based on a quartz tuning fork and a micro-fabricated cantilever. This system has two degrees of freedom, associated with its two components. We developed a model for describing how the sample-tip interaction is transduced to the tuning fork. It is based on two coupled spring-mass systems. In a first...

Université de Neuchâtel

Scanning probe arrays for life sciences and nanobiology applications

Aeschimann, Laure ; Meister, André ; Akiyama, Terunobu ; Chui, Benjamin W. ; Niedermann, Philippe ; Heinzelmann, Harry ; de Rooij, Nicolaas F. ; Staufer, Urs ; Vettiger, Peter

In: Microelectronic Engineering, 2006, vol. 83, no. 4-9, p. 1698-1701

Various 1D and 2D scanning probe arrays with integrated piezoresistive sensors have been developed in view of nanobiology and life science applications. For such applications, the experiments need usually to be performed under liquid conditions. The probe arrays have been fabricated by using silicon micromachining techniques and SOI wafers. For biological applications, when the cantilevers are...

Université de Neuchâtel

Concept and Demonstration of Individual Probe Actuation in Two-Dimensional Parallel Atomic Force Microscope System

Akiyama, Terunobu ; Aeschimann, Laure ; Chantada, Laura ; de Rooij, Nicolaas F. ; Heinzelmann, Harry ; Herzig, Hans-Peter ; Manzardo, Omar ; Meister, André ; Polesel-Maris, Jérôme ; Pugin, Raphaël ; Staufer, Urs ; Vettiger, Peter

In: Japanese Journal of Applied Physics, 2007, vol. 46, no. 9B, p. 6458-6462

A concept of an array actuator that is used to control the tip–sample separation of cantilevers in a two-dimensional (2D) probe array scanning system is proposed in this article. The feasibility of the concept is demonstrated with a 10×10 array actuator with 500 µm xy-pitches. The array actuator is made by slicing a bulk piezoceramic block. The obtained maximum actuation of a single...