Université de Neuchâtel

Diffractive structures for testing nano-meter technology

Blattner, Peter ; Naqvi, S. S. H. ; Herzig, Hans-Peter ; Ehbets, Peter

In: Microelectronic Engineering, 1995, vol. 27, no. 1-4, p. 543-546

We investigated two optical methods for characterizing submicron structures. Average errors of a few nanometers can be determined by the far-field diffraction metrology utilizing diffractive structures having enhanced sensitivity to fabrication errors. The scanning spot metrology is well suited for analyzing lithographic masks.

Université de Neuchâtel

Unconventional treatment of focal shift

Vokinger, Urs ; Dändliker, René ; Blattner, Peter ; Herzig, Hans-Peter

In: Optics Communications, 1998, vol. 157, no. 1-6, p. 218-224

We present an unconventional approach for the explanation of focal shift behind a lens. It is based on the fact that, within the approximation of Fresnel diffraction, the intensity distributions in the conjugate planes of a lens are equal to their geometrical images. We show that the focus (position of highest intensity) is always shifted towards the lens. The results for a Gaussian beam and a...

Université de Neuchâtel

Rigorous diffraction theory applied to microlenses

Blattner, Peter ; Herzig, Hans-Peter

In: Journal of Modern Optics, 1998, vol. 45, no. 7, p. 1395-1403

In this paper, we discuss the behaviour of small cylindrical microlenses, arranged in one-dimensional arrays and as single elements. For this purpose, we apply a standard rigorous diffraction theory, commonly used for diffraction gratings. We investigate the coupling effect between the elements. It turns out that single elements behave like periodic elements if the spacing is chosen correctly....

Université de Neuchâtel

Diffractive optics for compact space communication terminals

Blattner, Peter ; Herzig, Hans-Peter ; Weible, Kenneth J. ; Teijido, Juan M. ; Heimbeck, Hans-Joerg ; Langenbach, E. ; Rogers, J.

In: journal of mo, 1996, vol. 43, no. 7, p. 1473-1484

Free-space laser communication links with data rates between 10 and 500 Mbits s-1 are required to cover the large amount of communication needs between low-orbit satellites, geostationary satellites and ground stations. The objective of this paper is to demonstrate the potential of diffactive optical elements for the design of optical and optoelectronic systems for advanced laser...

Université de Neuchâtel

Optical testing of fine grating structures

Blattner, Peter ; Herzig, Hans-Peter

In: Optical Inspection and Micromeasurements (Proceedings of SPIE), 1996, vol. 2782, no. 6, p. 628-634

The ability to measure the relief parameters and the absolute position accuracy of micrometer-sized structures is of obvious importance, not only to determine if the desired structure has been realized, but also to optimize the fabrication process. In this paper a simple characterization method is presented allowing fast and non-destructive testing of phase and amplitude gratings over large...

Université de Neuchâtel

Scanning spot metrology for testing of photolithographic masks

Blattner, Peter ; Herzig, Hans-Peter ; Sohail, S. ; Naqvi, H.

In: Optical Engineering, 1995, vol. 34, no. 8, p. 2425

We investigated an optical method for characterizing submicrometer structures of photolithographic masks, enabling fast and non-destructive testing over large areas. The scanning spot metrology provides accurate information about edge locations of opaque structures on chrome masks. Algorithms for the extraction of edge locations from the detector signal are discussed and applied to the...