Affiner les résultats

Type de document

Collection spécifique


Université de Neuchâtel

Tuning the resonance of a photonic crystal microcavity with an AFM probe

Märki, Iwan ; Salt, Martin Guy ; Herzig, Hans-Peter

In: Optics Express, 2006, vol. 14, no. 7, p. 2969-2978

We present theoretical and experimental results on switching and tuning of a two-dimensional photonic crystal resonant microcavity by means of a silicon AFM tip, probing the highly localized optical field in the vicinity of the cavity. On-off switching and modulation of the transmission signal in the kHz range is achieved by bringing an AFM tip onto the center of the microcavity, inducing a...

Université de Neuchâtel

Analysis of the phonon-polariton response of silicon carbide microparticles and nanoparticles by use of the boundary element method

Rockstuhl, Carsten ; Salt, Martin Guy ; Herzig, Hans-Peter

In: Journal of the Optical Society of America B, 2005, vol. 22, no. 2, p. 481-487

We investigate the small-particle phonon-polariton response of several microstructures that are made of silicon carbide (SiC). Phonon polaritons can be excited in a wavelength region between 10 and 12 µm. Simple structures such as elliptical cylinders support phonon polaritons at two wavelengths, which depend on the axis ratio of the particle. In particles with a more irregular shape such as...

Université de Neuchâtel

Dispersive compact Fourier transform spectrometer for the visible

Manzardo, Omar ; Kipfer, Peter ; Herzig, Hans-Peter

In: Technical Digest Series, Fourier Transform Spectroscopy : New Methods and Applications, 1999, p. 165-167

A dispersive compact Fourier transform spectrometer is realized which operates in the visible wavelength range. No moving parts, no imaging system and compactness are the characteristics of this spectrometer. It is based on a novel beam splitter design, which reduces the influence of the size of the light source and therefore the spatial coherence requirements. The effect of dispersion due to an...

Université de Neuchâtel

On the chromatic aberration of microlenses

Ruffieux, Patrick ; Scharf, Toralf ; Herzig, Hans-Peter ; Völkel, Reinhard ; Weible, Kenneth J.

In: Optics Express, 2006, vol. 14, no. 11, p. 4687-4694

The optical properties of plano-convex refractive microlenses with low Fresnel Number (typically FN < 10) are investigated. It turns out that diffraction effects at the lens aperture limit the range of the effective focal length. The upper limit of the focal length is determined by the diffraction pattern of a pinhole with equal diameter. In addition achromatic microlenses can be realized because...

Université de Neuchâtel

Total internal reflection holography for optical interconnections

Prongue, Damien ; Herzig, Hans-Peter

In: Optical Engineering, 1994, vol. 33, no. 2, p. 636-642

We applied near-field total internal reflection holography to solve the problems of miniaturization of lenslet arrays. A regular 100x100 lenslet array with a 390-p.m focal length and a nonregular lenslet array for clock distribution to a specially designed VLSI circuit were recorded in a planar-optics configuration. We also developed an appropriate recording technique to satisfy both the...

Université de Neuchâtel

Diffractive beamshaping elements at the fabrication limit

Singer, Wolfgang ; Herzig, Hans-Peter ; Kuittinen, Markku ; Piper, Eckhard ; Wangler, Johannes

In: Optical Engineering, 1996, vol. 35, no. 10, p. 2779-2787

We treat the generation of flat-top intensity distributions, as required for laser applications at short wavelengths. To obtain high fill factors and almost arbitrary shapes, arrays of diffractive Fresnel zone plates at the fabrication limit are investigated. The angular power spectrum noise due to the binarization of the transmission phase function is smoothed using an incoherent source. The...

Université de Neuchâtel

Micro-sized spectrometer based on a lamellar grating interferometer

Manzardo, Omar ; Michaely, Roland ; Schadelin, Felix ; Herzig, Hans-Peter ; Noell, Wilfried ; Overstolz, Thomas ; de Rooij, Nicolaas F.

In: IEEE/LEOS (Lasers and Electro-Optics Society) International Conference on Optical MEMS, 2003, p. 175-176

A lamellar grating interferometer (LGI) realized by silicon micro-machining is presented. The LGI is a binary grating with a variable depth. The motion is carried out by an electrostatic comb drive actuator fabricated by silicon-on-insulator (SOI) technology. It is used as Fourier transform spectrometer (FTS). We have measured an optical path difference maximum of 82 /spl μ/m. The measured...

Université de Neuchâtel

Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics

Noell, Wilfried ; Sun, Winston ; de Rooij, Nicolaas F. ; Herzig, Hans-Peter ; Manzardo, Omar ; Dändliker, René

In: Lasers and Electro-Optics Society (LEOS). The 15th Annual Meeting of the IEEE, 2002, vol. 2, p. 580-581

Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very...

Université de Neuchâtel

Fabrication technologies for micro-optical elements with arbitrary surfaces

Schilling, Andreas ; Nussbaum, Philippe ; Philipoussis, Irene ; Herzig, Hans-Peter ; Stauffer, Laurent ; Rossi, Markus ; Kley, Ernst-Bernhard

In: Micromachining Technology for Micro-Optics (Proceedings of SPIE), 2000, vol. 4179, p. 65-72

We present a comparison of three different technologies for the fabrication of micro-optical elements with arbitrary surfaces. We used direct laser writing in photoresist, binary mask lithography in combination with reactive ion etching in fused silica, and High-Energy- Beam-Sensitive (HEBS) glass graytone lithography in photoresist. We analyzed the efficiencies and the deflection angles of...

Université de Neuchâtel

Lateral error reduction in the 3D characterization of deep MOEMS devices using white light interference microscopy

Montgomery, Paul C. ; Montaner, Denis ; Manzardo, Omar ; Herzig, Hans-Peter

In: Optical Micro- and Nanometrology in Manufacturing Technology (Proceedings of SPIE), 2004, vol. 5458, p. 34-42

White light scanning interference microscopy, with its high axial resolution, is particularly useful for the rapid 3D characterization of MOEMS micro-systems. Although this technique can be used for submicron critical dimension measurement on micron high microelectronic structures, recent tests using a standard system have revealed errors of up to 3 µm in the measurement of lateral position of...