Faculté des sciences

Influence of substrate on the microstructure of microcrystalline silicon layers and cells

Bailat, Julien ; Vallat-Sauvain, Evelyne ; Feitknecht, Luc ; Droz, Corinne ; Shah, Arvind

In: Journal of Non-Crystalline Solids, 2002, vol. 299-302, p. 1219-1223

Hydrogenated microcrystalline silicon i-layers were deposited with a fixed silane concentration on various substrates and incorporated into n–i–p solar cells. ‘Average crystallinity' and detailed microstructure of layers and devices were evaluated by X-ray diffraction (XRD) and transmission electron microscopy (TEM), respectively. The role of the substrate is thereby shown to be very... Plus

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    Summary
    Hydrogenated microcrystalline silicon i-layers were deposited with a fixed silane concentration on various substrates and incorporated into n–i–p solar cells. ‘Average crystallinity' and detailed microstructure of layers and devices were evaluated by X-ray diffraction (XRD) and transmission electron microscopy (TEM), respectively. The role of the substrate is thereby shown to be very critical; a change in the substrate can cause a transition from amorphous to microcrystalline growth in micrometer-thick layers. When crystalline growth occurs, the layer microstructure is depth-dependent.