Faculté des sciences

A novel low noise hydrogenated amorphous silicon pixel detector

Moraes, D. ; Anelli, G. ; Despeisse, M. ; Dissertori, G. ; Garrigos, A. ; Jarron, P. ; Kaplon. J. ; Miazza, C. ; Shah, Arvind ; Viertel, G. M. ; Wyrsch, Nicolas

In: journal of n, 2004, vol. 338-340, p. 729-731

Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 μm pitch based on a n–i–p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles... Plus

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    Summary
    Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 μm pitch based on a n–i–p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. The deposition was performed by VHF-PECVD, which enables high rate deposition up to 2 nm/s. Direct particle detection using beta particles from 63Ni and 90Sr sources was performed.