Faculté des sciences

Monolithically integrated optical displacement sensor in GaAs/AlGaAs

Hofstetter, Daniel ; Zappe, H. P. ; Dändliker, René

In: Electronics Letters, 1995, vol. 31, no. 24, p. 2121-2122

A monolithically integrated displacement sensor has been fabricated in the GaAs/AlGaAs material system. The device is configured as a Michelson interferometer and consists of a DBR laser, a directional coupler, transparent waveguides and a photodetector. Interference fringes could be seen at a measurement distance of up to 45 cm, requiring only the alignment of an external GRIN lens for beam... Plus

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    Summary
    A monolithically integrated displacement sensor has been fabricated in the GaAs/AlGaAs material system. The device is configured as a Michelson interferometer and consists of a DBR laser, a directional coupler, transparent waveguides and a photodetector. Interference fringes could be seen at a measurement distance of up to 45 cm, requiring only the alignment of an external GRIN lens for beam collimation.