Faculté des sciences

Oxygen-segregation-controlled epitaxy of Y2O3 films on Nb(110)

Hayoz, J. ; Bovet, M. ; Pillo, T. ; Schlapbach, Louis ; Aebi, Philipp

In: Applied Physics A: Materials Science & Processing, 2000, vol. 71, no. 6, p. 615-618

We demonstrate a very simple and reliable method of manufacturing clean, single-crystalline Y2O3 films on Nb(110) substrates in situ. The method exploits the oxygen bulk contamination of Nb as a source of clean oxygen. For substrate temperatures above 800 K oxygen segregation to the Nb surface is so efficient, that yttrium becomes oxidized during deposition without any... Plus

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    Summary
    We demonstrate a very simple and reliable method of manufacturing clean, single-crystalline Y2O3 films on Nb(110) substrates in situ. The method exploits the oxygen bulk contamination of Nb as a source of clean oxygen. For substrate temperatures above 800 K oxygen segregation to the Nb surface is so efficient, that yttrium becomes oxidized during deposition without any background oxygen pressure required in the ultrahigh vacuum system. The crystallinity and stoichiometry of these films can be tuned by the deposition temperature. For Y deposition at 1300 K the formation of well-ordered (111)-oriented Y2O3 films is achieved.