Faculté des sciences

Design and Fabrication of Highly Efficient Fan-Out Elements

Herzig, Hans-Peter ; Prongué, Damien ; Dändliker, René

In: Japanese Journal of Applied Physics, 1990, vol. 29, no. 7, p. 1307-1309

This paper reports the calculation and fabrication of periodic phase structures fan-out elements with a theoretical conversion efficiency close to 100 percent and perfect uniformity. An efficiency of 92 percent was measured for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography. Plus

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    Summary
    This paper reports the calculation and fabrication of periodic phase structures fan-out elements with a theoretical conversion efficiency close to 100 percent and perfect uniformity. An efficiency of 92 percent was measured for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography.