Faculté des sciences

Micro-optical elements with arbitrary surfaces

Schilling, Andreas ; Nussbaum, Philippe ; Philipoussis, Irene ; Herzig, Hans-Peter ; Rossi, Markus ; Kley, Ernst-Bernhard

In: Diffractive Optics and Micro-Optics (DOMO), 2000, p. 234-236

We present a comparison of three different technologies for the fabrication of micro-optical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography incombination with reactive ion etching, and graytone lithography. Plus

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    Summary
    We present a comparison of three different technologies for the fabrication of micro-optical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography incombination with reactive ion etching, and graytone lithography.