Faculté des sciences

Optically tunable microcavity in a planar photonic crystal silicon waveguide buried in oxide

Märki, Iwan ; Salt, Martin Guy ; Herzig, Hans-Peter ; Stanley, Ross ; Melhaoui, L. El. ; Lyan, P. ; Fedeli, J. M.

In: Optics Letters, 2006, vol. 31, no. 4, p. 513-515

We present all-optical tuning and switching of a microcavity inside a two-dimensional photonic crystal waveguide. The photonic crystal structure is fabricated in silicon-on-insulator using complementary metal-oxide semiconductor processing techniques based on deep ultraviolet lithography and is completely buried in a silicon dioxide cladding that provides protection from the environment. By... Plus

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    Summary
    We present all-optical tuning and switching of a microcavity inside a two-dimensional photonic crystal waveguide. The photonic crystal structure is fabricated in silicon-on-insulator using complementary metal-oxide semiconductor processing techniques based on deep ultraviolet lithography and is completely buried in a silicon dioxide cladding that provides protection from the environment. By focusing a laser onto the microcavity region, both a thermal and a plasma dispersion effect are generated, allowing tuning and fast modulation of the in-plane transmission. By means of the temporal characteristics of the in-plane transmission, we experimentally identify a slower thermal and a fast plasma dispersion effect with modulation bandwidths of the order of several 100 kHz and up to the gigahertz level, respectively.