Faculté des sciences

Microlens lithography: A new approach for large display fabrication

Völkel, Reinhard ; Herzig, Hans-Peter ; Nussbaum, Philippe ; Singer, Wolfgang ; Dändliker, René ; Hugle, William B.

In: Microelectronic Engineering, 1996, vol. 30, no. 1-4, p. 107-110

Microlens lithography is a new lithographic method, that uses microlens arrays to image a lithographic mask onto a substrate layer. Microlens lithography provides photolithography at a moderate resolution for an almost unlimited area. The imaging system consists of stacked microlens arrays forming an array of micro-objectives. Each micro-objective images a small part of the mask pattern, the... Plus

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    Summary
    Microlens lithography is a new lithographic method, that uses microlens arrays to image a lithographic mask onto a substrate layer. Microlens lithography provides photolithography at a moderate resolution for an almost unlimited area. The imaging system consists of stacked microlens arrays forming an array of micro-objectives. Each micro-objective images a small part of the mask pattern, the images overlap in the image plane. Potential applications for microlens lithography are the fabrication of large area flat panel displays (FPD), color filters, and micromechanics.