Faculté des sciences

Optical testing of fine grating structures

Blattner, Peter ; Herzig, Hans-Peter

In: Optical Inspection and Micromeasurements (Proceedings of SPIE), 1996, vol. 2782, no. 6, p. 628-634

The ability to measure the relief parameters and the absolute position accuracy of micrometer-sized structures is of obvious importance, not only to determine if the desired structure has been realized, but also to optimize the fabrication process. In this paper a simple characterization method is presented allowing fast and non-destructive testing of phase and amplitude gratings over large... More

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    Summary
    The ability to measure the relief parameters and the absolute position accuracy of micrometer-sized structures is of obvious importance, not only to determine if the desired structure has been realized, but also to optimize the fabrication process. In this paper a simple characterization method is presented allowing fast and non-destructive testing of phase and amplitude gratings over large areas. Local line width and position errors can be detected. The theoretical modeling is based on rigorous diffraction theory.