Faculté des sciences

Microsystems for Optical Imaging and Interconnects

Dändliker, René ; Herzig, Hans-Peter ; Völkel, Reinhard

In: Unconventional Optical Elements for Information Storage, Processing and Communications, 2000, vol. 2, no. 5, p. 89-97

We report on our activities in the design, fabrication, characterization and system integration of planar micro-optical elements. Microfabrication technologies like photolithography, resist processing and reactive ion etching (RIE) are used to manufacture arrays of refractive and diffractive micro-optical elements. Microlens arrays, gratings, beam shapers and beam-splitters have been fabricated,... Plus

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    Summary
    We report on our activities in the design, fabrication, characterization and system integration of planar micro-optical elements. Microfabrication technologies like photolithography, resist processing and reactive ion etching (RIE) are used to manufacture arrays of refractive and diffractive micro-optical elements. Microlens arrays, gratings, beam shapers and beam-splitters have been fabricated, tested and integrated in chemical analysis systems (μTAS), multiple channel imaging systems for photolithography and micro-optic spectrometers.