Faculté des sciences

Simple technique for replication of micro-optical elements

Nussbaum, Philippe ; Philipoussis, Irène ; Husser, Aline ; Herzig, Hans-Peter

In: Optical Engineering, 1998, vol. 37, no. 6, p. 1804-1808

A simple technique for the replication of micro-optical elements is presented. Elastomeric material is used to realize a negative mold of the original optical element and UV-curing adhesive is used to make the replicated copy. Replicated elements, such as refractive and diffractive micro-optical elements, are produced. The refractive microlenses have a diameter of 970 µm and a height of 79 µm... Plus

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    Summary
    A simple technique for the replication of micro-optical elements is presented. Elastomeric material is used to realize a negative mold of the original optical element and UV-curing adhesive is used to make the replicated copy. Replicated elements, such as refractive and diffractive micro-optical elements, are produced. The refractive microlenses have a diameter of 970 µm and a height of 79 µm and the diffractive element is a multilevel blazed grating with a period of 64 µm. The characteristics of the replicated elements are measured using different methods. The deviation from a sphere of the original and the replicated refractive microlenses is 0.13λ and 0.12λ root mean square (rms), respectively. The replicated multilevel blazed grating has a diffraction efficiency of over 80%. An alternative method for realizing planoconcave microlenses from a planoconvex master is also presented.