Faculté des sciences
Texte intégral

Holographically recorded gratings on microlenses for a miniaturized spectrometer array

Traut, S. ; Herzig, Hans-Peter

In: Optical Engineering, 2000, vol. 39, no. 1, p. 290-298

We report on the investigation of refractive microlens arrays with diffractive grating surfaces in the context of a microspectrometer array system. The elements fabricated combine the fairly large dimensions of the refractive microlens (990-µm diam, 60-µm height) with the submicron features of the diffraction grating (1-µm grating period) on one transmitting surface. The fabrication process of... Plus

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    Titre
    • Holographically recorded gratings on microlenses for a miniaturized spectrometer array
    Auteur
    • Traut, S.. Institut de Microtechnique, Université de Neuchâtel, Switzerland
    • Herzig, Hans-Peter. Institut de Microtechnique, Université de Neuchâtel, Switzerland
    Type de document
    • Postprint
    Date de publication
    • 2000
    Langue
    • Anglais
    Publié dans
    • Optical Engineering, 2000, vol. 39, no. 1, p. 290-298. International Society for Optical Engineering (SPIE)
    Autre version électronique
    Identifiant OAI-PMH
    • oai:doc.rero.ch:20071211115947-AL
    Numéro de soumission
    • 20071211115947-AL
    Summary
    We report on the investigation of refractive microlens arrays with diffractive grating surfaces in the context of a microspectrometer array system. The elements fabricated combine the fairly large dimensions of the refractive microlens (990-µm diam, 60-µm height) with the submicron features of the diffraction grating (1-µm grating period) on one transmitting surface. The fabrication process of these elements was studied, as well as their performance with respect to resolution and stray-light suppression. The maximum resolution was 3 nm, and the stray-light suppression 25 dB. We present a concept for a system of miniaturized spectrometer arrays for chemical analysis.