Faculté des sciences

Design, fabrication and testing of microlens arrays for sensors and microsystems

Nussbaum, Philippe ; Völkel, R. ; Herzig, Hans-Peter ; Eisner, M. ; Haselbeck, S.

In: Pure and Applied Optics: Journal of the European Optical Society Part A, 1997, vol. 6, no. 6, p. 617-636

We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented. Plus

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    Summary
    We report on our activities in design, fabrication, characterization and system integration of refractive microlens arrays for sensors and microsystems. Examples for chemical analysis systems (μTAS, blood gas sensor), neural networks and multiple pupil imaging systems for photolithography (microlens and smart mask lithography) are presented.